Inside the chamber of the SEM

SEM-FIB lab

FEI Quanta 3D FEG
Inside the chamber of the SEM
Image: Dr. Dennis Harries

REM FIB

Image: Dr. Dennis Harries
  • Scanning electron microscope with high resolution Schottky field emission emitter
  • Dual beam focused-ion-beam (FIB) optics for microsample preparation of TEM samples
  • Gas injections system for micro-deposition of platinum and Omniprobe 100 micromanipulator for in situ transfer of TEM samples
  • EDAX Genesis EDX system
  • high and low vacuum mode
Falko Langenhorst, Prof. Dr
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Prof. Dr. Falko Langenhorst
Image: Anne Günther (University of Jena)